UPDATED. 2019-11-11 23:03 (월)
Nanometrics "We are targeting 20% market share of thin film measuring equipment."
Nanometrics "We are targeting 20% market share of thin film measuring equipment."
  • Stan LEE
  • 승인 2019.01.18 17:11
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Supports 128-stage 3D NAND flash
[Semicon Korea 2019 Exhibitor]
Nanometrics Atlas III OCD instrumentation equipment.
Nanometrics Atlas III OCD instrumentation equipment.

Nanometrics, a semiconductor inspection and measuring equipment company, aims for the sales of 110 billion won this year. In 2018, the company generated sales of 89bn won. It will also try to achieve 20% market share of the thin film (membrane quality) measuring equipment. This is because, as the difficulty in semiconductor microprocessing increases, the need for searching the inside structures in more detail has increased.

Nanometrics specializes in Optical Critical Dimension (OCD) measuring equipment. It is a technology that can look at semiconductor structure using light. The issue cannot be solved by simply using optical equipment. There must be an algorithm that can analyze the data quickly and accurately. Having the right software is the key.

Recently, it has become necessary to use various materials for DRAM and NAND flash. As the material layer becomes thicker, the thin film structure becomes more complicated. "How to interpret reflected light greatly affects the performance," said Jang Joon-won, CEO of Nanometrics Korea. The thin film measuring equipment can handle 200 sheets per hour, and OCD measurement equipment for the structural analysis can handle 140 to 150 wafers per hour."

Nanometrics is the dominant player in the domestic OCD measurement equipment market. KLA-Tencor is the No. 1 in the thin film measuring equipment market. The domestic market is estimated to be between 170~190bn won annually by combining the two devices. The market is gradually expanding due to the addition of etching and various chemical vapor deposition (CVD) processes. In recent years, a long wavelength (IR) technology has been developed which further increases the wavelength of light. With the current technology, it is possible to grasp the characteristics and structure of the film up to 128 stages of 3D NAND flash.

Nanometrics will participate in the Semicon Korea 2019 exhibition and introduce the Atlas III, impulse measurement equipment. The company will prove that it can enhance customer competitiveness based on the unique structural analysis algorithm and hardware reliability.

 


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