UPDATED. 2019-10-23 00:08 (수)
LOT Vacuum "We will become a Global Vacuum Industry Solutions Provider."
LOT Vacuum "We will become a Global Vacuum Industry Solutions Provider."
  • JY HAN
  • 승인 2019.01.22 14:48
  • 댓글 0
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Expansion of business into secondary battery, chemical, and pharmaceutical.
[Semicon Korea 2019 Exhibitor]
LOTVacuum's ultra-low-power, high-efficiency, high-durability semiconductor dry vacuum pump XD1200.
LOT Vacuum's ultra-low-power, high-efficiency, high-durability semiconductor dry vacuum pump XD1200.

LOT Vacuum, a manufacturer of dry vacuum pump equipment for semiconductors and displays, has set its goal of becoming a global vacuum solution provider. We will increase the proportion of overseas customers at home and abroad and expand pump sales to the general industrial sector rather than semiconductors and displays.

Most of the LOT Vacuum sales come from semiconductor pump equipment. The company is also increasing the equipment supply in the display field. However, general industries such as secondary batteries, chemicals, and pharmaceuticals are still under development. LOT Vacuum's mid- to long-term growth plan is to expand its business scope and sales to the general industrial sector while continuing to grow in the semiconductor and display fields. The company will continue to diversify its client base in China.

The company will also expand the Total Exhaust System (TES) business. TES is a phrase that refers to a PPS (Plasma Pre_treatment System), which is located in the piping between the chamber and the pump to effectively process gas and byproducts by plasma, APS (After Treatment Plasma System) installed in the pump exhaust part to process exhaust gas, as well as other control systems and diagnosis systems. Some individual product lines have already been supplied to customers and applied to mass production lines.

"The goal is to, by combining competitive dry vacuum pump equipment and TES, become a global solution provider for vacuum equipment," said Cho Chang-wan, Director of business planning at LOT Vacuum.

LOT Vacuum is the only vacuum pump manufacturer in Korea. Most of the semiconductors and pre-display processes are completed in a vacuum. The vacuum pump sucks in various materials including gases into the equipment chamber to create a vacuum. Based on the 300mm wafer input standard, a semiconductor factory with the production capacity of 140,000 ~ 150,000 units per month will have a vacuum pump of about 6,000 units.

LOT Vacuum has a screw-type vacuum pump technology that sucks and expels material while rotating a pair of screws of the same type in the rotation. LOT Vacuum vacuum equipment is highly rated by many global semiconductor display companies due to its high exhaust, noise, power consumption, and small size.


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