UPDATED. 2019-11-20 16:50 (수)
SEMES Cleaning Equipment ‘Lotus’ Wins Jang Young-Sil Award
SEMES Cleaning Equipment ‘Lotus’ Wins Jang Young-Sil Award
  • JY HAN
  • 승인 2018.11.22 16:44
  • 댓글 0
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Significant Improvement in Hourly Wafer Cleaning Steps
Lotus, SEMES Cleaning Equipment.
Lotus, SEMES Cleaning Equipment.

SEMES, Korea’s leading semiconductor and display Equipment manufacturer announced on 21 Nov, the receiving of IR52 Jang Young-Sil Award for its Wafer Wet Clean / PR Strip Equipment ‘Lotus’.

Jang Young-Sil Ward was established in 1991 by the Ministry of Science and Technology Information, and Korea Industrial Technology Association to nurture and encourage new researches by engineers. The award selects one product per week, a total of 52 throughout the year, thus called IR52 (Industrial Research, 52 weeks).

SEMES ‘Lotus’ is an equipment that removes thin film material or impurities from within its semiconductor wafer cleaning process.

It will be later used during etching and stripping processes. The award-winning ‘Lotus’ was developed as the world’s first facility to handle 19nm particles. There has been a significant improvement in its performance to remove fibrils with an enhancement in its capacity from 8 to 12 chambers, to deal with 500 wafers per hour.

Kim Yong Shik, SEMES CEO said, “We created ‘Lotus’ to gain the world’s No. 1 market share, and this award truly means a lot to us. In the future, we will continue to achieve more conceptual excellence not only in better facilitating the semiconductor equipment, but also on the design.”

SEMES achieved USD 2.4 billion (KRW 2 trillion) sales for the firsttime last year. Apart from developing core equipment for semiconductor and display, the company is also planning to enter the top 5 of equipment manufacturer globally, by 2025.


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